Fast¬†¬†FIND      full search   tips    
Serving  Our Guest Log in   Register to bid, list, and trade   Submit items to sell   
ALL CATEGORIES   Wafer Fabrication Eq   Plasma Processing Eq   Plasma Etch Eq   Parallel Pl Tools   Single Chamber Tools    View    Search-by-Specs   

FULL DESCRIPTION of Item 55400

in Other Etchers
Item ID: 55400

Offered 1 Offered at Best Price


PLASMA THERM WAF'R BATCH 74

Parrell Plasma Etcher
PLASMA THERM WAF'R BATCH 74
  Click to see additional image(s)... other images

Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer Plasma-Therm
Model WAF'R BATCH 74
End Point Detection AG-300
Other Information 
  • Serial Number: PDP-066M(02)
  • Date of Manufacture: March 1988
  • ADVANCED ENERGY System Controller
  • RF Plasma RF-5 Generator
  • AG-300 Auto Gain Endpoint Detector
  • MKS Type 252A Exhause Valve Controller
  • (2) BROOKS 5850E Mass Flow Controllers