Other Information |
- Serial Number M912180
- 9 ½ ”(w) X 22 ½”d) x 9”(h) Aluminum Chamber with 5ea Shelf Electrodes
- Model 3000 - 2 Gas Process Controller
- PM119 500 Watt RF Generator
- Manual and Automatic Operation Modes
- Pressure: 0.2 to 1 Torr
- RF Power: 0 to 500 Watts
- Gas Flow: 0 to 1800 SCCM Mixable Through 2ea Flowmeters of 900 SCCM each
- Process Time: 0 to 99.9 Minutes (or Continuous)
- Purge Gas: 7 to 15 PSIG N2, Ar or CDA
- Vacuum Valve Control Gas: 60 to 80 PSIG N2 or CDA
|