KLA-Tencor RS-55tc Resistivity Test Tool
- Accommodates all Wafer Sizes from 50mm – 200mm
- Sheet Resistance Measurement of 5 mohm/sq to 5 Mohm/sq
- Typical Measurement Time: 5 – 4.5 Seconds per Test Site
- <0.2% (1 sigma) Measurement Repeatability
- X-Y Map: Programmable Up to 1200 Sites
- Probe Qualification: 20 sites
- 1 - 30 Programmable Routine Test Sites (ASTM Standard Tests Included)
- PC Based System Controller with Color Monitor