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in Single Chamber RTP Tools
Item ID: 157047

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MPT (Modular Process Technology) RTP-600xp

Rapid Thermal Processing System
MPT (Modular Process Technology) RTP-600xp
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer Modular Process Tech
Model RTP-600xp
Description Rapid Thermal Processing System
Other Information 
  • Serial Number 95294    Date of Mfg:  Aug. 2004
  • Windows NT Based Bench Top RTP Unit
  • Integrated Pentium Processor & Flat Panel Display
  • Applications Include Rapid Thermal Alloying, Annealing, Implant Activation, Oxidation & Reflow
  • Thermal Processing of Si, Ge, Si/Ge, GaAs, InP and Other Semiconductor Materials
  • Capable of Processing 2"-6" Wafer Size
  • 250-1300°C Temperature Range Rate
  • 1-200°C/sec Temperature Ramp Rate
  • Quartz Process Chamber, Capable of Handling Inert & Reactive Gases
  • Dual Color Pyrometer with Auto-Calibration Feature
  • Up to 6 Channels MFC Control
Power Requirements 208 V     80.0 A     60 Hz     3 Phase
Year of Manufacture 2004
Exterior Dimensions 
  Width 24.000  in  (61.0 cm)
  Depth 23.000  in  (58.4 cm)
  Height 14.000  in  (35.6 cm)
Weight 150  lb  (68 kg)