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FULL DESCRIPTION of Item 178887

in Photoresist Curing Tools
Item ID: 178887

Offered1 Offered at Best Price


Fusion M150PC Photoresist Stabilization Tool

Fusion M150PC Photoresist Stabilization Tool
  • Part # 070304; Serial # P8E800CG
  • Configured for 75-150mm Wafers
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  • Input Power: 208VAC, 60Hz, 3 Ph., 30A/Ph.


Fusion M150PC Photoresist Stabilization Tool
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer Fusion Systems Inc.
Model M150PC
Description Photoresist Stabilization Tool
Wafer Size Range 
  Minimum 75 mm
  Maximum 150 mm
  Set Size 150 mm
Cassette to Cassette YES
Condition Excellent
Power Requirements 208 V     30.0 A     60 Hz     3 Phase