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KLA Altair 8920i AOI Tool
KLA Altair 8920i AOI Tool - For 200mm & 300mm Patterned & Unpatterned Wafers
- Brightfield/Darkfield Optics
- 2X, 3.5X, 5X & 10X Objectives
- 35X Review Capability
- 0.4 um Max DF Sensitivity
- Die to Die Detection Algorithm
- Focus Tracking
- RBB Defect Classification
- 18 WPH Throughput
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