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KLA Altair 8935i AOI Tool
KLA Altair 8935i AOI Tool - For 150mm & 200mm Patterned & Unpatterned Wafers
- For GaN & GaAs on Sapphire & Silicon Wafers
- Brightfield/Darkfield Optics
- 2X, 5X, 10X & 20X Objectives
- 35X LWD Review Capability
- 0.2 um Max DF Sensitivity
- Die to Die Detection Algorithm
- Focus Tracking
- RBB Defect Classification
- 6.5 WPH Throughput
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