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FULL DESCRIPTION of Item 262166

in Cluster Plasma Tools - Other
Item ID: 262166

Offered 1 Offered at Best Price


LAM RESEARCH 2300 Dielectric/Metal Etch Tool

LAM RESEARCH 2300 Dielectric/Metal Etch Tool

  • 2300 Platform V2 Etch Transfer Module
    • 3ea 200mm Open Cassette Loadports
    • Front & Side User Interface Monitors
    • CDM Wafer Handling Robot
  • 2300 Exelan Flex45 Dielectric Etch Process Module
    • OES 2 End Point Detection
    • Low Temperature ESC
    • Boce 2700 LPM Turbo Pump
    • 16 Regulated Gas Channels
  • Versys HP Metal Etch Process Module
    • OES 2 End Point Detection
    • Boce 2200 LPM Turbo Pump
    • 16 Regulated Gas Channels
  • Microwave Stripper Process Module
    • On Board Gas System
    • 3 Regulated Gas Channels
  • Manufactured in 2023
  • Unused Since Installation/Qualification
  • All Pumps, Generators & Other Subsystems Included
  • PLEASE CONTACT US FOR FURTHER INFORMATION
LAM RESEARCH 2300 Dielectric/Metal Etch Tool
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Location: Tokyo, Tokyo, Japan
Unit Price Unstated
Number of Units 1
Manufacturer LAM Research Corp.
Model 2300
Wafer Size Range 
  Minimum 200 mm
  Maximum 300 mm
  Set Size 200 mm
Number of Chambers 3
Process Capabilities Dielectric Etch/Metal Etch/Microwave Strip
CE Marked YES
Year of Manufacture 2023
Condition Like New