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FULL DESCRIPTION of Item 264812

in Deep UV Wafer Stepper
Item ID: 264812

Offered 1 Offered at Best Price


ASML Twinscan AT /1100 Wafer Scanner

ASML Twinscan AT 1100 Wafer Scanner

  • Cymer Nanolith 7600A 193 nm ArF Laser System
  • Dual 300mm Wafer Stages
  • FOUP Loadport & Open Cassette Wafer Handling
  • 3ea Water Chillers Included
  • All Air Handling Equipment Included
  • Tool is Removed from Service and Ready for Crating
 ASML Twinscan AT /1100 Wafer Scanner
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Location: Austin, Texas, United States
Unit Price Unstated
Number of Units 1
Manufacturer ASML
Model Twinscan AT /1100
Wafer Size Range 
  Minimum 200 mm
  Maximum 300 mm
  Set Size 300 mm
Wafer Handler Size Range 
  Minimum 200 mm
  Maximum 300 mm
  Set Size 300 mm
Wafer Handling Random Access Robot
Reticle Plate Size 6'' x 6''
Illuminator Model Number Cymer NL 7600A
Controller Type PC/VME
Interfaced to PR Track  YES
Environmental Enclosure Provided YES
Accessories 

Extraction Unit

Condition Very Good
Power Requirements 230/460 V     50/60 Hz
CE Marked YES