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in Single Chamber RTP Tools
Item ID: 3322

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AG Associates 2106

Rapid Thermal Processing System
AG Associates 2106
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer AG Associates
Model 2106
Description Rapid Thermal Processing System for 3
Cassette to Cassette YES
Other Information 
  • Rebuilt by Modular Process Technology
  • Applications: Implant Activation, Silicide Formation, Oxide Reflow (PSG & BPSG), Alloying
  • Cassette to Cassette Handling of 3”-6” Wafers
  • Microprocessor-controlled
  • 60-100 Wafers per Hour Throughput, Depending on Anneal Cycle
  • 400-1250ºC Temperature Range
  • 1-300 Seconds Anneal Time
  • Electrical Requirements: 208-240V, 3 Ohm, 60A maximum
  • Water Requirements: 2 GPM at 60-75 PSG
  • Dimensions: 46” x 36” x 38”
Refurbished YES
Exterior Dimensions 
  Width 46.000  in  (116.8 cm)
  Depth 36.000  in  (91.4 cm)
  Height 38.000  in  (96.5 cm)