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in Single Chamber RTP Tools
Item ID: 49891

Offered 1 Offered at Best Price

AG Associates Heatpulse 2146

Single Chamber Rapid Thermal Processor PARTS TOOL ONLY
AG Associates Heatpulse 2146
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer AG Associates
Model Heatpulse 2146
Description Single Chamber RTP
Cassette to Cassette YES
Other Information 
  • Rapid Thermal Annealing
  • Oxide & Nitride Film Deposition
  • Cassette to Cassette Handling of 4”-6” Wafers
  • 2 Axis Robot for Transporting Wafers to Heating Chamber
  • 400°C to 1300°C Temperature Range
  • Programmable 0-600 sec Steady State Process Time
  • 120 Wafers/Hour Null Cycle (Zero Processing Time)
  • Wafer Cooldown Stage
  • Full Range Dual Pyrometer
  • SECS Communications