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FULL DESCRIPTION of Item 54652

in Overlay Registration
Item ID: 54652

Offered 1 Offered at Best Price


BioRad Q7/Q8 Overlay Metrology Tool

Overlay Metrology Tool for up to 200mm Wafers
BioRad Q7/Q8 Overlay Metrology Tool
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer Bio-Rad
Model Q7/Q8
Wafer Size Range 
  Maximum 200 mm
Cassette to Cassette YES
Other Information 
  • Serial Number Q2128; Date of Mfg: 12/30/97
  • Configured for 150mm Wafers
  • 2ea Send & Receive Cassette Elevators for 75mm – 200mm Wafers
  • Wafer Loading Arm with Optical Flatfinder
  • XYZ Stage with 200mm Wafer Chuck & Stage Fiducial
  • 3.5X, 30X & 70X Objectives Lenses
  • 2ea COHU 6700 Series CCD Cameras
  • Model 6100000 Xenon Illumination Lamp House
  • System Controller with UNIX Based Operating System
  • VME Box with FORCE ELECTRONICS SYS68K CPU-30BE/16 CPU
  • Digital Tape Backup and 3 ½” Floppy Disk Drive
  • 2ea LCD Monitors
  • MITSUBISHI P68U Video Copy Processor
  • SECS/GEM Communications
  • CE Marked
Year of Manufacture 1997