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in Automatic Wafer Inspection Tools
Item ID: 61515

Offered 1 Offered at Best Price

NIKON Optistation 2A

Automatic Wafer Inspection System w/Auto Focus

NIKON Optistation 2A

Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer Nikon
Model Optistation 2A
Description Automatic Wafer Inspection System
Other Information 
  • Cassette to Cassette Handling of 4" to 6" Wafers
  • Trinocular Head with Auto Focus with Manual Focus Override
  • 10X Widefield Focusing Eyepieces
  • 10X, 20X and 40X BD Plan Objective Lenses
  • 6" X 6" XY Programmable Wafer Stage Motion with Joystick Manual Override
  • EPI Illuminator with Variable Intensity and 50 Watt Halogen Lamp
  • Wafer Transfer Unit with Pre-aligner & Integrated Robotic Loading Arm
  • 1ea Send Cassette Elevator
  • 2ea Receive Cassette Elevators
  • 2ea System Controlled Inker Assemblies
  • 2ea Operator Control Boxes with Keypads
  • CPU with IEEE-488 & RS-232 Interface