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FULL DESCRIPTION of Item 61872

in Microspectrophotometers
Item ID: 61872

Offered 1 Offered at Best Price


Nanometrics NanoSpec AFT #010-0181

Film Thickness Analyzers
Nanometrics NanoSpec AFT #010-0181
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer Nanometrics
Model NanoSpec 181
Wafer Size Range 
  Maximum 125 mm
Other Information 
  • Large Throat-Depth Microscope
  • CODATA CTS-102 Microcomputer for Storage of Up to 16 Files
  • 480 – 800nm Wavelength Range
  • OLYMPUS MPlan 10X, 40X & 100X Objective Lenses
  • Sliding Dual Wafer Stage for 4”& 5” Wafers
  • DIGITEK Thermal Printer
  • RS 232 Communication Port
  • Operators Manual Included
  • Analyzes the Following Films:
  • Silicon Dioxide on Silicon - Less than 400 – 30,000A ± 2%
  • Silicon Nitride on Silicon - Less than 400 – 10,000A ± 2%
  • Negative Resist on Silicon - Less than 500 – 40,000A ± 5%
  • Polysilicon on 300 – 1,200A SiO2 - Less than 400 – 10,000A ± 2%
  • Negative Resist on 500 – 15,000A SiO2 - 4,000 – 30,000A ± 5%
  • Silicon Nitride on 300 – 3,500A SiO2 - 300 – 3,500A ± 5%
  • Thin Oxide on Silicon - Less than 100 to 500A ± 20A
  • Thin Nitride on Silicon - Less than 100 to 500A ± 20A
  • Polyimide on Silicon - 500 – 10,000A ± 5%
  • Positive Resist on Silicon - 500 – 40,000A ± 5%
  • Positive Resist on 500 – 15,000A SiO2 - 4,000 – 30,000A ± 5%