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Megasonic Cleaners
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Wafer Size Range Minimum
Wafer Size Range Maximum
Wafer Size Range Set Size
Quick Dump Rinse
Automatic Wafer Transfer
Programmable Carrier Oscillation
Megasonic Diffusing Lens
Resistivity Monitor
Cassettes per Load
Controller Type
Software Revision Level
Other Information
Extended Description
Power Requirements Voltage
Power Requirements Amps
Power Requirements Amps 2
Power Requirements Frequency
Power Requirements Phase
CE Marked
Year of Manufacture
External Cooling
Cooling Water Reqd Minimum Flow
Cooling Water Reqd Minimum Temperature
Cooling Water Reqd Maximum Temperature
Operating Air Pressure
Air Consumption
Vacuum Required
Exterior Dimensions Width
Exterior Dimensions Depth
Exterior Dimensions Height