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FULL DESCRIPTION of Item 247844

in 4 & 6 Point Probes
Item ID: 247844

Offered 1 Offered at $ 35,000.00


KLA-Tencor RS-55tc Resistivity Test Tool

KLA-Tencor RS-55tc Resistivity Test Tool

  • Accommodates all Wafer Sizes from 50mm – 200mm
  • Sheet Resistance Measurement of 5 mohm/sq to 5 Mohm/sq
  • Typical Measurement Time: 5 – 4.5 Seconds per Test Site
  • <0.2% (1 sigma) Measurement Repeatability
  • X-Y Map: Programmable Up to 1200 Sites
  • Probe Qualification: 20 sites
  • 1 - 30 Programmable Routine Test Sites (ASTM Standard Tests Included)
  • PC Based System Controller with Color Monitor

Location: Austin, Texas, United States
Unit Price $ 35,000.00
Number of Units 1
Manufacturer KLA-Tencor
Model RS-55tc
Wafer Size Range 
  Minimum 75 mm
  Maximum 200 mm
  Set Size 200 mm
Resistivity Testing YES
Sheet Resistance Testing YES
Controller Type PC Controller Type
Refurbished YES