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KLA Altair 8935-FFC AOI Tool
KLA Altair 8935-FFC AOI Tool - For 200mm Patterned Wafers on Film Frames
- Brightfield/Darkfield Optics
- 2X, 5X, 10X & 20X Objectives
- 35X LWD Review Capability
- 0.2 um Max DF Sensitivity
- Die to Die Detection Algorithm
- Focus Freeze (High Topo) ADAR
- Deep Learning ADC
- 4 WPH Throughput
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