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KLA Altair 8920i AOI Tool
KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool - Combines Brightfield & Darkfield Defect Detection with Flexible LED Illumination
- Fastest Available Excursion Monitoring Capability for >0.2 um Defects
- Phoenix T 3.0 Three Port Wafer Handler for 6” & 8” Wafers
- High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X
- High Performance Review Objective: 35X
- Low Warpage Chuck for 6” & 8” Wafers
- Multi-Region Based Thresholding
- Advanced Detection Algorithms
- Automated Review Sampling
- Brightfield Review Mode
- Litho Bevel Centricity
- Autofocus Capability
- Rules Based Binning
- Manufactured in 2021
- Contact Us for Pricing
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