Other Information |
- Tabletop
- Vacuum Free Horizontal Transfers
- Transfers Performed by a Mono Transfer Finger
- Automated Mapping of the Wafers within the Cassette
- Wafers are Handled by a Minimal Linear Contact on the Rear Side of the Wafer
- Preprogrammed Automated Transfer Options: Split, Merge, Compression, Randomization and Block Wafer Transfers
- Continuous Wafer Status/Position Monitoring by Optical Sensors throughout the cycle
- Compatible with most SEMI Standard Cassettes
- RS232 Port; SUBD25 Port
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