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FULL DESCRIPTION of Item 131378

in Automatic Wafer Inspection Tools
Item ID: 131378

Offered 1 Offered at Best Price


Nikon Optistation 3

Wafer Inspection Tool for 6" Wafers

Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer Nikon
Model Optistation 3
Description Wafer Inspection Tool
Cassette to Cassette YES
Other Information 
  • Cassette to Cassette Handling of 150mm Wafers
  • Non-Contact Wafer Pre-Alignment
  • Trinocular Head with Motorized Nosepiece and Motorized Auto Focus
  • NIKON BD Plan APO Objectives: 10X & 20X
  • NIKON BD Plan APO Objective: 100X
  • NIKON 10X Widefield Eyepieces
  • EPI Illuminator (Brightfield/Darkfield) with 50 Watt Halogen Lamp
  • 6” (dia.) Wafer Stage with 6" x 6" XY Programmable Motion & Joystick Manual Override
  • Observing Points – 150 Channels with Max. 50 Point Memory per Channel
  • 2ea X Axis Wafer Transfer Shuttles
  • 2ea Y Axis Wafer Transfer Shuttles
  • 2ea Send/Receive Cassette Elevators