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in Single Chamber RTP Tools
Item ID: 217150

Offered 1 Offered at Best Price

AET TECHNOLOGIES Rapid Annealing Furnace

AET TECHNOLOGIES Rapid Annealing Furnace

  • 130mm (dia.) x 740mm (long) Quartz Annealing Chamber for 3” Wafers with 27ea IR Lamps
  • EUROTHERM 2704 Advanced Multi-Loop Temperature Controller
  • EUROTHERM 7300A Three Phase Power Controller
  • LEYBOLD TTR 91 S Thermovac Vacuum Sensor
  • LEYBOLD Display One Single Channel Vacuum Gauge Display
  • VAT 24428-KA31 Pneumatic HV Right Angle Valve
  • TELSTAR RD-9 Vacuum Pump
  • HORIBA SEC-E40 Mass Flow Meter
  • HORIBA ROD-1 MB Modular Readout
  • Type K Sheathed Alumina Thermocouples – System Control, Over-Temp Sense, User Sense
  • Heating power: 50kW
  • Input Power: 380-400VAC; 3Ph; 50Hz 125A
AET TECHNOLOGIES Rapid Annealing Furnace
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Location: Plano, Texas, United States
Unit Price Unstated
Number of Units 1
Manufacturer AET Technologies
Model Rapid Annealing Furnace
Description AET TECHNOLOGIES Rapid Annealing Furnace

SiC Coated Graphite Susceptors


Other Information 

On consignment from IET

Power Requirements 380 V     125.0 A     50 Hz     3¬†Phase
CE Marked YES
Year of Manufacture 2007
Condition Excellent