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FULL DESCRIPTION of Item 225948

in Other Etchers
Item ID: 225948

Offered 1 Offered at $ 85,000.00


Plasma-Therm 790 Reactive Ion Etcher - Remaufactured with ECT Upgrade

PLASMA-THERM 790 Reactive Ion Etcher; Serial Number PTI-78272F

  • Manually Loaded Process Chamber with 8” (dia.) Cathode
  • Gas Distribution Panel with 4ea Gas Channels
    • MKS 1479 Metal Sealed Mass Flow Controllers
    • 4ea Additional Gas Channels Available
  • RFPP RF5S RF Generator: 500W @ 13.56MHz
  • RFPP AMN-5 Auto Matching Network
  • RFPP AMNPS-2A Auto Matching Network Controller
  • Leybold TMP 361 Turbomolecular Pump
  • Leybold NT 150/360 Turbomolecular Pump Controller
  • EquipmentWorks 2.6 Application SW
  • Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU at 3.4 GHz,16Gb RAM & 500GB SSD
  • All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol.
  • All I/O Modules Available from BECKHOFF Automation and are Plug & Play Compatible
  • All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol
  • All SMC Pneumatic Valves Available from SMC USA
  • Standard 21” Flat Panel Monitor, Keyboard & Mouse
  • Edwards QDP40 Dry Roughing Pump
  • NESLAB HX-75 Chiller
  • Electrical Disconnect Box - 208V, 60Hz, 3 Ph
  • System Fully Refurbished & Ready for Demonstration
  • Guaranteed to Meet or Exceed OEM Specifications
  • Price……$ 85,000.00 USD
Plasma-Therm 790 Reactive Ion Etcher - Remaufactured with ECT Upgrade
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Location: Plano, Texas, United States
Unit Price $ 85,000.00
Number of Units 1
Manufacturer Plasma-Therm
Model 790
Wafer Size Range 
  Minimum 75 mm
  Maximum 200 mm
Process RIE
Controller Type PC Controller Type
Software Revision Level ECT
Interface Other
High Vacuum Pump Leybold TMP361
Roughing Pump Edwards QDP40
RF Generator Model RFPP RF5S
Number of Gas Inputs Four Gas
Chillers 
  Number of Chillers 1
  Chiller #1Manufacturer/Model Neslab HX-75
Power Requirements 208 V     60 Hz     3¬†Phase
Refurbished YES
Condition Like New