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in Acid Wet Stations
Item ID: 24073

Offered 1 Offered at Best Price

Akrion UP-V2 SA.3200 - PARTS TOOL ONLY

Semi-Automatic Wet Process Station Parts Including Process Tanks, Robots and More
Akrion UP-V2 SA.3200 - PARTS TOOL ONLY
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer Akrion
Model UP-V2 SA.3200
Wafer Size Range 
  Minimum 75 mm
  Maximum 150 mm
  Set Size 150 mm
Automatic Wafer Transfer YES
Automatic Wafer Transfer Type Robotic
Controller Type PLC Controller Type
Other Information 
  • 3ea UP AKRION Model UP-ATA Robots w/Controllers
  • 4ea Temperature Controlled PVDF Process Baths 16” x 9” x 10”(id) w/Re-circulation and Filtration
  • 3ea PVDF QDR tanks 16” x 9” x 9” (id) w/Lid Spray
  • SIEMENS PLC Control System
  • 3ea IWAKI WALCHEM CORP. Model MD 100LFY-1 Magnet Pump
  • 1ea TREBOR Magnum 610 Pump
  • 4ea WAFAB Heat Exchangers
Power Requirements      3 Phase