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FULL DESCRIPTION of Item 247843

in Other Film Thickness Testers
Item ID: 247843

Offered 1 Offered at $ 55,000.00


KLA-Tencor UV-1050 Thin Film Measurement Tool

KLA-Tencor UV-1050 Thin Film Measurement Tool

  • Cassette to Cassette Wafer Handling
  • Wafer sizes: 100mm, 150mm & 200mm
  • Broadband UV Optics
  • Dual Beam Spectrophotometry
  • Applications: Polysilicon, UV Reflectivity & Simultaneous Oxide and TiN Thickness for CMP
  • System Control PC with Windows NT OS
  • Summit Application Software
  • GEM / SECS Communication
  • System Installation at Destination Available

Location: Austin, Texas, United States
Unit Price $ 55,000.00
Number of Units 1
Manufacturer KLA-Tencor
Model UV-1050
Description UV Thin Film Measurement Tool
Wafer Size Range 
  Minimum 100 mm
  Maximum 200 mm
  Set Size 300 mm
Multi-Layer Film Capacity YES
Scanning Stage YES
Wafer Mapping YES
Controller Type PC Controller Type
Condition Excellent
Refurbished YES