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FULL DESCRIPTION of Item 249589

in Other Film Thickness Testers
Item ID: 249589

Offered 2 Offered at Best Price


KLA-Tencor ASET-F5x Thin Film Measurement System

KLA-TENCOR ASET-F5x Thin Film Measurement System

  • Serial Number 0202802R
  • Manufactured in June, 2002
  • Inspection Modes Include:
    • Dual Beam Spectrometry
    • Spectroscopic Ellipsometry
    • Film Stress Analysis
  • SUMMIT™ Application Software Version 3.21.16
  • FTML Version 3.46.06
  • Model 300DFF1P Wafer Loading Platform
    • Dual Loadports for 300mm Wafers
    • Three Axis Wafer Handling Robot
  • GEM / SECS Communication
  • Inquire for Additional Details
 KLA-Tencor ASET-F5x Thin Film Measurement System
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Location: Austin, Texas, United States
Unit Price Unstated
Number of Units 2
Manufacturer KLA-Tencor
Model ASET-F5x
Description Thin Film Measurement System
Wafer Size Range 
  Minimum 200 mm
  Maximum 300 mm
  Set Size 300 mm
Illumination Source Type Multi-wavelength Source
Multi-Layer Film Capacity YES
Micro Spot Optics YES
Scanning Stage YES
Wafer Mapping YES
Software Revision Level SUMMIT 3.21.16
Condition Excellent
Year of Manufacture 2002
Refurbished YES
CE Marked YES