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APPLIED MATERIALS Centura TPCC EPN
APPLIED MATERIALS Centura TPCC EPN - Serial Number 21693; Manufactured in 2011
- Electro Polished Nickel Frame & Modules
- 2ea ENP Centura Loadlocks for 200mm Wafers
- Wafer Transfer Chamber with HP Robot
- High Temperature Quartz End Effector
- On the Fly Wafer Centering
- 2ea TanOx Chambers - Positions C & D
- 2ea ENP Fast Cooldown Chambers
- V452 Main Control Board
- Gas Panel with 2ea Gas Pallets
- Interconnect Cables
- AC Distribution Rack – 160A
- Through the Wall Installation Kit
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