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FULL DESCRIPTION of Item 250827

in Cluster PECVD Tools
Item ID: 250827

Offered 1 Offered at Best Price


APPLIED MATERIALS Centura TPCC EPN

APPLIED MATERIALS Centura TPCC EPN 

  • Serial Number 21693; Manufactured in 2011
  • Electro Polished Nickel Frame & Modules
  • 2ea ENP Centura Loadlocks for 200mm Wafers
  • Wafer Transfer Chamber with HP Robot
    • High Temperature Quartz End Effector
    • On the Fly Wafer Centering
  • 2ea TanOx Chambers - Positions C & D
  • 2ea ENP Fast Cooldown Chambers
  • V452 Main Control Board
  • Gas Panel with 2ea Gas Pallets
  • Interconnect Cables
  • AC Distribution Rack – 160A
  • Through the Wall Installation Kit
 APPLIED MATERIALS Centura TPCC EPN
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Location: Plano, Texas, United States
Unit Price Unstated
Number of Units 1
Manufacturer Applied Materials
Model Centura TCPP
Wafer Size Range 
  Minimum 150 mm
  Maximum 200 mm
  Set Size 200 mm
Number of Chambers 2
Controller Type PC/VME
Process Gases 2ea Pallets
Condition Very Good