Unit Price |
Unstated |
Number of Units |
1 |
Manufacturer | Tokyo Electron Ltd |
Model | Precio |
Wafer Size Range | |
Minimum | 200 mm |
Maximum | 300 mm |
Set Size | 300 mm |
Cassette to Cassette | YES |
Number of Cassette Elevators | 2 |
Wafer Handling | Random Access Robot |
Vacuum Chuck | |
Diameter | 11.8110 in (300.00 mm) |
Temperature Controlled Chuck | YES |
Automatic Alignment | YES |
OCR Camera | YES |
Probe Mark Inspection | YES |
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RELATED DOCUMENTS: click links to view |
TEL Precio - PP03171 - Image 1 |
TEL Precio - PP03171 - Image 2 |
TEL Precio - PP03171 - Image 3 |
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