Accent Optical Technologies QS-2200A FT-IR Spectrometer
- KBR Optical Components
- Reflective Measurement of Epitaxial Silicon Thickness
- Automatic Wafer Handling
- Genmark Robot with Integrated Flatfinder & Controller
- Dual Cassette Platforms for up to 200mm Wafers
- ACCENT Robot Interface
- ACCENT 013-4738-2 Stage Controller
- ACCENT 013-4758-2 AC Power Box
- Control PC Running Windows XP OS
- ACCENT GUI Application Software
- SECS/GEM Interface Software