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CD Measurement Eq

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FULL DESCRIPTION of Item 35762

in Critical Dimension Scanning Electron Microscopes

Item ID: 35762

1 Offered at Best Price

Hitachi S-7000
CD SEM Measurement Tool
... other images

Location: Plano, TX, United States

Unit Price Unstated

Number of Units 1

Manufacturer Hitachi

Model S-7000

Wafer Size Range
  Minimum 100 mm

  Maximum 150 mm

  Set Size 150 mm

Resolution 150.00 Å

Acceleration Voltage

  Maximum Voltage 3 kV

Critical Dimension Measurement Range 0.10 µm - 200.00 µm
CD Measurement Resolution 150  Å  (15 nm)

Cassette to Cassette YES

Tilting Stage YES

Gun Type Field Emission

Other Information

Cassette-to-Cassette Handling for 4”, 5” & 6” Wafers
100X ~ 100,000X Magnification
0.1 ~ 200 µm Measurement Range
15 nm Guaranteed (at 1 kV) Secondary Electron Image Resolution
± 0.02 µm or ±1%, whichever is greater, Reproducibility
0.7 ~ 3 kV (100 V/step)
Auto-Focus and Auto-Stigmation
Fully Automated CD Measurement
Fully Programmable Stage with up to 60° Tilt
Multi Point Measurement Capability

Year of Manufacture 1989

Condition Good