Other Information |
- Serial Number 202579
- Fringe Sensitivity Range: 0.5 to 10.0 micrometers per fringe
- System Accuracy: 0.25 micrometers
- Maximum Test Area: 5.0 x 4.5 inches
- Maximum Resolution: 0.10 micrometers
- Tilt Adjustable Work Holders in 2 Dimensions:
- 4” x 4”, 5” x 5” Photo plates
- 2” and 3” Wafers and Slices
- Light Source: HeNe Laser
- Dimensions: 23”H x 181/2”W x 101/2D
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