| Other Information |
- Serial Number Q2128; Date of Mfg: 12/30/97
- Configured for 150mm Wafers
- 2ea Send & Receive Cassette Elevators for 75mm – 200mm Wafers
- Wafer Loading Arm with Optical Flatfinder
- XYZ Stage with 200mm Wafer Chuck & Stage Fiducial
- 3.5X, 30X & 70X Objectives Lenses
- 2ea COHU 6700 Series CCD Cameras
- Model 6100000 Xenon Illumination Lamp House
- System Controller with UNIX Based Operating System
- VME Box with FORCE ELECTRONICS SYS68K CPU-30BE/16 CPU
- Digital Tape Backup and 3 ½” Floppy Disk Drive
- 2ea LCD Monitors
- MITSUBISHI P68U Video Copy Processor
- SECS/GEM Communications
- CE Marked
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