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in Wafer Transfer Units
Item ID: 76999

Offered 1 Offered at Best Price

Mactronix UKA-650

Automatic Wafer Transfer Station for 6" Wafers

Eureka Senior Series III
Mactronix UKA-650
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer Mactronix
Model UKA-650
Description Automatic Wafer Transfer Station
Other Information 
  • Transfers Wafers Between one 25-slot Carrier and One 50 Slot Quartz Boat
  • Carriers/Boats can be Plastic, Teflon, Quartz, Silicon Carbide, Polysilicon and Metal
  • Air Operated
  • Minimized Wafer Contact
  • Preserved Flat Alignment
  • Hard Black Anodized Frame
  • Retainers Default to Closed Position to Prevent Dropping Wafers in the Event of Air Pressure Loss
  • Vacuum Sensors
  • Pressure: 70 to 90 PSI C.D.A. or N2
  • Vacuum: 20"-22" Hg
Exterior Dimensions 
  Width 8.200  in  (20.8 cm)
  Depth 12.200  in  (31.0 cm)
  Height 26.300  in  (66.8 cm)