Other Information |
- Transfers Wafers Between one 25-slot Carrier and One 50 Slot Quartz Boat
- Carriers/Boats can be Plastic, Teflon, Quartz, Silicon Carbide, Polysilicon and Metal
- Air Operated
- Minimized Wafer Contact
- Preserved Flat Alignment
- Hard Black Anodized Frame
- Retainers Default to Closed Position to Prevent Dropping Wafers in the Event of Air Pressure Loss
- Vacuum Sensors
- Pressure: 70 to 90 PSI C.D.A. or N2
- Vacuum: 20"-22" Hg
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