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in Automatic Wafer Inspection Tools
Item ID: 87091

Offered 1 Offered at Best Price

Nikon Optistation 3A

Automatic Wafer Inspection Station
Nikon Optistation 3A

Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer Nikon
Model Optistation 3A
Description Automatic Wafer Inspection Station
Cassette to Cassette YES
Other Information 
  • Cassette to Cassette Handling of 200mm Wafers
  • Non-Contact Wafer Pre-Alignment
  • Trinocular Head with Motorized Nosepiece and Motorized Auto Focus
  • NIKON BD Plan Objectives: 5X, 20X & 40X
  • NIKON BD Plan APO Objective: 100X
  • NIKON 10X Widefield Eyepieces
  • EPI Illuminator (Brightfield/Darkfield) with 50 Watt Halogen Lamp
  • 8” (dia.) Wafer Stage with 8" x 8" XY Programmable Motion & Joystick Manual Override
  • Observing Points – 150 Channels with Max. 50 Point Memory per Channel
  • 2ea X Axis Wafer Transfer Shuttles
  • 2ea Y Axis Wafer Transfer Shuttles
  • 2ea Send/Receive Cassette Elevators
Year of Manufacture 1997