Other Information |
- Cassette to Cassette Handling of 200mm Wafers
- Non-Contact Wafer Pre-Alignment
- Trinocular Head with Motorized Nosepiece and Motorized Auto Focus
- NIKON BD Plan Objectives: 5X, 20X & 40X
- NIKON BD Plan APO Objective: 100X
- NIKON 10X Widefield Eyepieces
- EPI Illuminator (Brightfield/Darkfield) with 50 Watt Halogen Lamp
- 8” (dia.) Wafer Stage with 8" x 8" XY Programmable Motion & Joystick Manual Override
- Observing Points – 150 Channels with Max. 50 Point Memory per Channel
- 2ea X Axis Wafer Transfer Shuttles
- 2ea Y Axis Wafer Transfer Shuttles
- 2ea Send/Receive Cassette Elevators
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