Other Information |
- Serial Number 81456
- Heated & Water Cooled Platen for up to 200mm Wafers
- Dual Cassette Load/Unload Platforms
- MECS UTW-3100P Three Axis Wafer Robot
- MECS CS-1000 Robot Control System
- NIHON KOSHUHA MKN-152-3S Microwave Power Supply
- NIHON KOSHUHA MKN-152-384-OSC Microwave Oscillator Section
- NIHON KOSHUHA MPA-HZ4SI Power Sensor Amplifier
- NIHON KOSHUHA AMC-0604-15 Auto Matching Controller
- NIHON KOSHUHA Microwave Waveguide
- 3ea NIHON KOSHUHA MPS-60 Microwave Leak Detectors
- MKS 253A-11321 Throttle Valve
- MKS 252C-11009 Throttle Valve Controller
- ALCAN TECH HC-1000 Heater Controller
- ALCAN TECH PDA-801 Controller
- ALCATEL ADS-301 Dry Vacuum Pump/Blower Package
- Stainless Steel System Vacuum Plumbing
- Facilities Plumbing Cabinet
- Main Power Circuit Breaker Cabinet
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