Other Information |
- 3" Mask & 2" Wafers
- Will Modify Tool for Additional Capabilities
- Tamarack PRX-200-6 Lamp House PN 131-900
- 6"(dia.) UV Exposure System
- Tamarack EC-12-D Exposure Controller
- Radiation Power Systems HA-5A
- UV Power Supply
- Short Arc Power Supply - SN 38920; 95-135 VAC; 50/60 Hz
- Nikon UN Illumination XFMR - 120V 50/60 Hz
- Aperture Collection in Hardwood Case
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