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Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Cassette to Cassette Number of Send Elevators Number of Sort Elevators Wafer Handling Thickness Testing Flatness Testing Taper & Bow Testing Resistivity Testing Dopant Typing	Wafer Mapping Controller Type Software Revision Level Interface Accessories Other Information Extended Description Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency Power Requirements Phase CE Marked Year of Manufacture	Refurbished Condition External Cooling Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature Operating Air Pressure Air Consumption Vacuum Required Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight