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Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Number of Furnace Tubes Process Gas System Gas Input Control Gas System Process Gases Gas System Bubbler Gas System Source Furnace Cantilever Loader Vacuum Pump Manufacturer/Model RF Generator Model Process Gas System Gas Input Control Gas System Process Gases Gas System Bubbler Gas System Source Furnace Cantilever Loader Vacuum Pump Manufacturer/Model RF Generator Model Process	Gas System Gas Input Control Gas System Process Gases Gas System Bubbler Gas System Source Furnace Cantilever Loader Vacuum Pump Manufacturer/Model RF Generator Model Process Gas System Gas Input Control Gas System Process Gases Gas System Bubbler Gas System Source Furnace Cantilever Loader Vacuum Pump Manufacturer/Model RF Generator Model Gas Cabinet Loading Station Controller Manufacturer/Model Software Revision Level Maximum Temperature Minimum Temperature Number of Control Zones Flat Zone Length	Overtemperature Protection Interface Accessories Other Information Extended Description Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency Power Requirements Phase Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature CE Marked Year of Manufacture Refurbished Condition Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight