Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Number of Positions Number of Robots Position 1 Process Position 1 Tank Material Position 1 Other Features Position 2 Process Position 2 Tank Material Position 2 Other Features Position 3 Process Position 3 Tank Material Position 3 Other Features Position 4 Process Position 4 Tank Material Position 4 Other Features Position 5 Process Position 5 Tank Material Position 5 Other Features Position 6 Process Position 6 Tank Material
Position 6 Other Features Position 7 Process Position 7 Tank Material Position 7 Other Features Position 8 Process Position 8 Tank Material Position 8 Other Features Position 9 Process Position 9 Tank Material Position 9 Other Features Position 10 Process Position 10 Tank Material Position 10 Other Features Position 11 Process Position 11 Tank Material Position 11 Other Features Position 12 Process Position 12 Tank Material Position 12 Other Features Automatic Wafer Transfer Automatic Wafer Transfer Type Controller Type Software Revision Level Mini-Environment
Accessories Other Information Extended Description Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency Power Requirements Phase CE Marked Year of Manufacture Condition Refurbished External Cooling Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature Operating Air Pressure Air Consumption Vacuum Required Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight