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Manufacturer Model Reduction Magnification Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Wafer Hndlr Size Rng Minimum Wafer Hndlr Size Rng Maximum Wafer Hndlr Size Rng Set Size Wafer Handling Reticle Plate Size Site to Site Alignment Illuminator Model Number Controller Type	Software Revision Level Interfaced to PR Track Interface Type Environmental Enclosure Provided Refurbished Accessories Other Information Extended Description Year of Manufacture Condition Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency	Power Requirements Phase CE Marked External Cooling Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature Operating Air Pressure Air Consumption Vacuum Required Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight