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Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Photoresist Type Number of Tracks Number of Cassette Elevators Number of Photoresist Coat Stations Number of Photoresist Dispenses Wafer Edge Bead Removal Wafer Backside Rinse Bowl Rinse	Number of Vapor Prime Hot Plates Number of Hot Plates Number of Chill Plates External Cooling Accessories Other Information Extended Description Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency Power Requirements Phase Operating Air Pressure	Air Consumption Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature Vacuum Required CE Marked Year of Manufacture Refurbished Condition Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight