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Plasma Processing Equipment


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Group Offers into sub-categories under Plasma Processing EquipmentGroup Offers into sub-categories under Plasma Processing Equipment

List all 19 product types under Plasma Processing EquipmentList all 19 product types under Plasma Processing Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes
Make Model
  $  
87228
Alcan Tech/Canon MAS-8000 
Alcan Tech/Canon MAS-8000 

List all items of this typeSingle Wafer Resist Strippers

in Plasma Resist Strippers

Alcan Tech/Canon MAS-8000:
Plasma Photoresist Stripper

Microwave Ashing System
1   F*
87656
Alcan Tech/Canon MAS-8000 
Alcan Tech/Canon MAS-8000 

List all items of this typeSingle Wafer Resist Strippers

in Plasma Resist Strippers

Alcan Tech/Canon MAS-8000:
Plasma Photoresist Stripper

Microwave Ashing System
1  
139078
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson / IPC 4055/2:
Plasma Surface Treatment Tool
1  
154299
Branson/IPC  

Branson/IPC  

3000C 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

1  
152146
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC 4055/2:
Plasma Surface Treatment Tool
1   F*
152147
Branson/IPC  

Branson/IPC  

4055/2 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC 4055/2:
Plasma Treatment Surface Tool
1   F*
4876
Branson/IPC  

Branson/IPC  

P-2100 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC P-2100:
Plasma Barrell Stripper, 3 Available
1  
4877
Branson/IPC  

Branson/IPC  

P-2100 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC P-2100:
Plasma Barrell Stripper, 3 Available
1  
217554
Branson/IPC S-2005  
Branson/IPC S-2005  

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

1  
49911
Branson/IPC  

Branson/IPC  

S-3100 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC S-3100:
Plasma Barrell Stripper, 12" x 20" Quartz
1  
152145
Branson/IPC  

Branson/IPC  

Series 4000 

List all items of this typeBarrel Resist Strippers

in Plasma Resist Strippers

Branson/IPC Series 4000:
Plasma Barrel Stripper

Plasma Asher / Cleaner System
1  
225948
Plasma-Therm  

Plasma-Therm  

790 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

Plasma-Therm 790 Reactive Ion Etcher - Remaufactured with ECT Upgrade:

PLASMA-THERM 790 Reactive Ion Etcher; Serial Number PTI-78272F

  • Manually Loaded Process Chamber with 8” (dia.) Cathode
  • Gas Distribution Panel with 4ea Gas Channels
    • MKS 1479 Metal Sealed Mass Flow Controllers
    • 4ea Additional Gas Channels Available
  • RFPP RF5S RF Generator: 500W @ 13.56MHz
  • RFPP AMN-5 Auto Matching Network
  • RFPP AMNPS-2A Auto Matching Network Controller
  • Leybold TMP 361 Turbomolecular Pump
  • Leybold NT 150/360 Turbomolecular Pump Controller
  • EquipmentWorks 2.6 Application SW
  • Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU at 3.4 GHz,16Gb RAM & 500GB SSD
  • All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol.
  • All I/O Modules Available from BECKHOFF Automation and are Plug & Play Compatible
  • All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol
  • All SMC Pneumatic Valves Available from SMC USA
  • Standard 21” Flat Panel Monitor, Keyboard & Mouse
  • Edwards QDP40 Dry Roughing Pump
  • NESLAB HX-75 Chiller
  • Electrical Disconnect Box - 208V, 60Hz, 3 Ph
  • System Fully Refurbished & Ready for Demonstration
  • Guaranteed to Meet or Exceed OEM Specifications
  • Price……$ 85,000.00 USD
1 85,000.00
225919
Plasma-Therm  

Plasma-Therm  

SLR 770 

List all items of this typeEtchers - Other

in Single Chamber Plasma Tools

Plasma-Therm SLR 770 ICP Etcher - Remaufactured with ECT Upgrade:

PLASMA-THERM SLR 770 ICP Etcher; Serial Number PTI-76536F 

  • Upgraded ICP Process Module (PM)
    • High Power/Easy Maintenance ICP Applicator
    • 10” (dia.) Lower Electrode
    • Ceramic Wafer Clamp
    • Helium Backside Cooling
    • Currently Configured for 6” Wafers
    • Other Wafer Sizes Available
  • Redesigned & Improved Load Lock Chamber with Linear Robotic Arm
    • LL Arm with Programmable Stepper Motor & Controller
    • Manual Wafer Loading for 6” & 8” Wafers
  • Gas Distribution Box with 4ea Gas Channels
    • MKS 1479 Metal Sealed Mass Flow Controllers
    • 4ea Additional Gas Channels Available (Option)
  • RFPP RF5S RF Generator: 500W @ 13.56MHz
  • RFPP AMN-5 500W Auto Matching Network
  • RFPP RF20M RF Generator: 2000W @ 2.0MHz
  • RFPP AMN-20 2KW Auto Matching Network
  • 2ea RFPP AMNPS-2A Auto Matching Network Controllers
  • SHIMADZU TMP1003 MAG LEV Turbo Pump with Controller
  • VAT 64 Rectangular Throttle Valve with VAT PM5 Controller
  • INFICON MPG500 Ion Gauge on ICP Chamber
  • MKS 325 Moducell Pirani Gauge on Load Lock
  • Watlow Three Zone Chamber Heater Controller
  • EquipmentWorks 2.4 Application SW
  • Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU @ 3.4GHz, 16GB RAM and 500GB SSD
  • All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via
    Modbus TCP/IP Communications Protocol
  • All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP
    Communications Protocol
  • All SMC Pneumatic Valves Available from SMC USA
  • Standard 22” Flat Panel Monitor, Keyboard & Mouse
  • Edwards QDP80 Dry Roughing Pump on Process Module
  • Agilent DS 302 Mechanical Pump on Load Lock 
  • SMC HRR018 Rackmount Chiller; 5-45° C Temperature Range
  • Electrical Disconnect Box - 208VAC, 60Hz, 3 Ph
  • System Completely Remanufactured and Ready for Demonstration
  • Guaranteed to Meet or Exceed OEM Specifications
  • Price………$ 225,000.00 USD

 

1 225,000.00


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.