|
Item ID |
Photo |
Short Description |
Product Type / Details |
#
|
Price |
Notes |
Make |
Model |
|
|
$ |
|
|
87228
|
Alcan Tech/Canon MAS-8000
|
Alcan Tech/Canon MAS-8000 |
in Plasma Resist Strippers
Alcan Tech/Canon MAS-8000:Plasma Photoresist StripperMicrowave Ashing System
|
1
|
|
|
F* |
|
|
87656
|
Alcan Tech/Canon MAS-8000
|
Alcan Tech/Canon MAS-8000 |
in Plasma Resist Strippers
Alcan Tech/Canon MAS-8000:Plasma Photoresist StripperMicrowave Ashing System
|
1
|
|
|
|
|
|
139078
|
Branson/IPC
|
Branson/IPC |
4055/2 |
in Plasma Resist Strippers
Branson / IPC 4055/2:Plasma Surface Treatment Tool
|
1
|
|
|
|
|
|
154299
|
Branson/IPC
|
Branson/IPC |
3000C |
in Plasma Resist Strippers
|
1
|
|
|
|
|
|
152146
|
Branson/IPC
|
Branson/IPC |
4055/2 |
in Plasma Resist Strippers
Branson/IPC 4055/2:Plasma Surface Treatment Tool
|
1
|
|
|
F* |
|
|
152147
|
Branson/IPC
|
Branson/IPC |
4055/2 |
in Plasma Resist Strippers
Branson/IPC 4055/2:Plasma Treatment Surface Tool
|
1
|
|
|
F* |
|
|
49911
|
Branson/IPC
|
Branson/IPC |
S-3100 |
in Plasma Resist Strippers
Branson/IPC S-3100:Plasma Barrell Stripper, 12" x 20" Quartz
|
1
|
|
|
|
|
|
251432
|
Branson/IPC
|
Branson/IPC |
Series 2000 |
in Plasma Etch Equipment
Branson/IPC Series 2000 Plasma Barrel Stripper:BRANSON/IPC Series 2000 Plasma Barrel Photoresist - BRANSON/IPC S2005-11020Reactor Center with 10” (i.d.) X 20” (h) Quartz Chamber
- S2000C Controller with 2ea Rotometer Controlled Gas Channels
- ENI OEM-12 1000 Watt RF Generator
|
1
|
|
|
|
|
|
152145
|
Branson/IPC
|
Branson/IPC |
Series 4000 |
in Plasma Resist Strippers
Branson/IPC Series 4000:Plasma Barrel Stripper
Plasma Asher / Cleaner System
|
1
|
|
|
|
|
|
252330
|
LAM Research Corp.
|
LAM Research Corp. |
9600SE |
in Single Chamber Plasma Tools
Lam Research 9600SE Rainbow Metal Etch Tool:Lam Research 9600SE Rainbow Metal Etch Tool - Rainbow Configuration Includes Post-Etch PR Strip Chamber
- Envision Software
- Configured for 200mm Wafers
- Currently Running in Fab – 9/16/2024
|
1
|
|
|
|
|
|
225948
|
Plasma-Therm
|
Plasma-Therm |
790 |
in Single Chamber Plasma Tools
Plasma-Therm 790 Reactive Ion Etcher - Remaufactured with ECT Upgrade:PLASMA-THERM 790 Reactive Ion Etcher; Serial Number PTI-78272F - Manually Loaded Process Chamber with 8” (dia.) Cathode
- Gas Distribution Panel with 4ea Gas Channels
- MKS 1479 Metal Sealed Mass Flow Controllers
- 4ea Additional Gas Channels Available
- RFPP RF5S RF Generator: 500W @ 13.56MHz
- RFPP AMN-5 Auto Matching Network
- RFPP AMNPS-2A Auto Matching Network Controller
- Leybold TMP 361 Turbomolecular Pump
- Leybold NT 150/360 Turbomolecular Pump Controller
- EquipmentWorks 2.6 Application SW
- Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU at 3.4 GHz,16Gb RAM & 500GB SSD
- All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol.
- All I/O Modules Available from BECKHOFF Automation and are Plug & Play Compatible
- All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol
- All SMC Pneumatic Valves Available from SMC USA
- Standard 21” Flat Panel Monitor, Keyboard & Mouse
- Edwards QDP40 Dry Roughing Pump
- NESLAB HX-75 Chiller
- Electrical Disconnect Box - 208V, 60Hz, 3 Ph
- System Fully Refurbished & Ready for Demonstration
- Guaranteed to Meet or Exceed OEM Specifications
- Price……$ 80,000.00 USD
|
1
|
|
80,000.00 |
|
|
|
251431
|
Plasma-Therm
|
Plasma-Therm |
SLR-770 |
in Single Chamber Plasma Tools
PLASMA-THERM SLR 770 ICP Plasma Etcher:PLASMA-THERM SLR 770 Inductively Coupled Plasma Etcher - Single Process Chamber with SLR (Shuttle Lock Transfer) Load Lock
- Manual Load with Load Lock Handling Currently Configured for 4” Wafers
- Ceramic Wafer Clamp with Helium Backside Cooling System
- Gas Distribution Box with 5ea Gas Channels
- ENI ACG-6 RF Generator: 600W @ 13.56MHz
- ENI Automatic Matching Network
- RFPP RF20M RF Generator: 2000W @ 2.0MHz
- RFPP Automatic Matching Network
- Six Zone Chamber Heater with Temperature Controller
- LEYBOLD 900 Turbo Pump with Mag 1000 Controller
- MKS ITR Ion Gauge Controller
- VAT Gate Valve with PM-5 Controller
- Mechanical Roughing Pump
- NESLAB HX-75 Chiller
- Electrical Disconnect Box - 208V, 60Hz, 3 phase
|
1
|
|
|
|
|