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ALL CATEGORIES   Wafer Fabrication Eq   Plasma Processing Eq   Plasma Etch Eq   Parallel Pl Tools

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	View All Offers Under Single Chamber Plasma Tools » Switch Major Category		Click an item's ID# below for its full specifications , or: Group Offers into sub-categories under Single Chamber Plasma Tools List all 6 product types under Single Chamber Plasma Tools

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Item ID  Photo Short Description Product Type / Details # Price Notes Make Model   $   252330 LAM Research Corp.   LAM Research Corp.   9600SE  Metal Etchers in Single Chamber Plasma Tools Lam Research 9600SE Rainbow Metal Etch Tool: Lam Research 9600SE Rainbow Metal Etch Tool Rainbow Configuration Includes Post-Etch PR Strip Chamber Envision Software Configured for 200mm Wafers Currently Running in Fab – 9/16/2024 1   225948 Plasma-Therm   Plasma-Therm   790  Etchers - Other in Single Chamber Plasma Tools Plasma-Therm 790 Reactive Ion Etcher - Remaufactured with ECT Upgrade: PLASMA-THERM 790 Reactive Ion Etcher; Serial Number PTI-78272F Manually Loaded Process Chamber with 8” (dia.) Cathode Gas Distribution Panel with 4ea Gas Channels MKS 1479 Metal Sealed Mass Flow Controllers 4ea Additional Gas Channels Available RFPP RF5S RF Generator: 500W @ 13.56MHz RFPP AMN-5 Auto Matching Network RFPP AMNPS-2A Auto Matching Network Controller Leybold TMP 361 Turbomolecular Pump Leybold NT 150/360 Turbomolecular Pump Controller EquipmentWorks 2.6 Application SW Industrial PC Running UBUNTU LINUX OS, Intel I7 CPU at 3.4 GHz,16Gb RAM & 500GB SSD All Analog & Digital I/O Modules Controlled by BECKHOFF Ethernet I/O Via Modbus TCP/IP Communications Protocol. All I/O Modules Available from BECKHOFF Automation and are Plug & Play Compatible All Pneumatic Valves Controlled by SMC Modules Via Modbus TCP/IP Communications Protocol All SMC Pneumatic Valves Available from SMC USA Standard 21” Flat Panel Monitor, Keyboard & Mouse Edwards QDP40 Dry Roughing Pump NESLAB HX-75 Chiller Electrical Disconnect Box - 208V, 60Hz, 3 Ph System Fully Refurbished & Ready for Demonstration Guaranteed to Meet or Exceed OEM Specifications Price……$ 80,000.00 USD 1 80,000.00 251431 Plasma-Therm   Plasma-Therm   SLR-770  Etchers - Other in Single Chamber Plasma Tools PLASMA-THERM SLR 770 ICP Plasma Etcher: PLASMA-THERM SLR 770 Inductively Coupled Plasma Etcher Single Process Chamber with SLR (Shuttle Lock Transfer) Load Lock Manual Load with Load Lock Handling Currently Configured for 4” Wafers Ceramic Wafer Clamp with Helium Backside Cooling System Gas Distribution Box with 5ea Gas Channels ENI ACG-6 RF Generator: 600W @ 13.56MHz ENI Automatic Matching Network RFPP RF20M RF Generator: 2000W @ 2.0MHz RFPP Automatic Matching Network Six Zone Chamber Heater with Temperature Controller LEYBOLD 900 Turbo Pump with Mag 1000 Controller MKS ITR Ion Gauge Controller VAT Gate Valve with PM-5 Controller Mechanical Roughing Pump NESLAB HX-75 Chiller Electrical Disconnect Box - 208V, 60Hz, 3 phase 1

*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
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   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.