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FULL DESCRIPTION of Item 111094

in Single Chamber RTP Tools
Item ID: 111094

Offered 1 Offered at Best Price


AG Associates Heatpulse 210M

Rapid Thermal Implant Monitor
AG Associates Heatpulse 210M
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer AG Associates
Model 210M
Description Rapid Thermal Processing System
Other Information 
  • Ion Implant Activation, Polysilicon Annealing, Silicide Formation, Oxide Reflow (PSG & BPSG), Alloying and Metallization
  • Single Wafer Process
  • Accommodates Wafer Sizes Through 4”
  • 400 - 1200ºC Operating Temperature Range
  • High-Intensity, Radiant Heating
  • 1-100 Seconds Processing Cycle
Year of Manufacture 1984