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FULL DESCRIPTION of Item 28517

in Metal Etchers
Item ID: 28517

Offered 1 Offered at Best Price


Trion Minilock RIE Plasma Etcher

RIE Single Wafer Plasma Metal Etcher
Trion Minilock RIE Plasma Etcher
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer Trion Technology
Model Minilock
Wafer Size Range 
  Set Size 200 mm
Controller Type PC Controller Type
Loadlock 
  Loadlock Yes/No YES
Number of Gas Inputs Four Gas
Process Gases O2, CF4, Cl2, BCl3
Other Information 
  • RIE Single Wafer Plasma Metal Etcher
  • Serial Number MNL6047
  • 8” (dia.) Chuck
  • RFX-600 RF Generator, 13.56 MHz
  • Automatic RF Matching Network
  • Vacuum Loadlock
  • 4ea Mass Flow Controllers
  • 100 sccm O2
  • 100 sccm CF4
  • 50 sccm Cl2
  • 100 sccm BCl3
  • PC Process Controller
  • Color Touch Screen Graphical User Interface
Year of Manufacture 1995