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FULL DESCRIPTION of Item 4856

in Horizontal Diffusion Furnaces
Item ID: 4856

Offered1 Offered at Best Price


MRL Industries 1024

3-Tube Horizontal Diffusion Furnace w/Cantilever Loaders
MRL Industries 1024
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer MRL Industries
Model 1024
Wafer Size Range 
  Minimum 150 mm
  Maximum 150 mm
  Set Size 150 mm
Number of Furnace Tubes 3
Furnace Tube #1:
Process Configured for 6" Wafers
Gas System 
  Gas Input Control Mass Flow Controllers
  Process Gases TCA, N2 & O2
Cantilever Loader YES
Furnace Tube #2:
Process Configured for 6" Wafers
Gas System 
  Gas Input Control Mass Flow Controllers
  Process Gases N2 & O2
Cantilever Loader YES
Furnace Tube #3:
Process Configured for 6" Wafers
Gas System 
  Gas Input Control Mass Flow Controllers
  Process Gases N2
Cantilever Loader YES
Furnace Tube #4:
Cantilever Loader YES
Gas Cabinet YES
Maximum Temperature 1,200  ºC  (2,192 ºF, 1,473 ºK)
Number of Control Zones 3
Other Information 
  • Serial Number 61194
  • Max Temperature 1200ºC
  • 3ea MRL “Black Max” #400-95705 Heating Elements with Spike Thermocouples
  • Furnace Tube 11.0” (i.d.) X 15.5” (o.d.) X 54” (l); 240V, 3 Ph, 22.1 KW
  • Load Zone – 16.0” (l); 10.5 KW
  • Center Zone – 20.0” (l); 6.3 KW
  • Source Zone – 8.0” (l); 5.3 KW
  • 3ea EUROTHERM Model FICS-11 Temperature Controllers
  • 3ea BURLING INSTRUMENTS Platinel II OTP Controllers
  • Miscellaneous Profile Thermocouples Available
  • MRL Automatic Loading Station with 3ea DIRECTION, INC. Cantilever Wafer Loaders
  • MRL GPM Gas Control Cabinet
  • Furnace Tube 1 – 3ea UNIT Model UFC-1100A MFCs
  • Gas #1: N2 – 10 SLM
  • Gas #2: O2 – 10 SLM
  • Gas #3: N2 – 1 SLM
  • Furnace Tube 2 – 2ea UNIT Model UFC-1100A MFCs
  • Gas #1: N2 – 10 SLM
  • Gas #2: O2 – 10 SLM
  • Furnace Tube 3 – 1ea UNIT Model UFC-1100A MFC
  • Gas #1: N2 – 10 SLM
  • 3ea ARGUS Gas Control Modules
  • 2ea J.C. SCHUMACHER Model 100 Source Temperature Control Systems
  • Upgraded with a PLC Controller