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in Patterned Wafer Inspection
Item ID: 77963

Offered 1 Offered at Best Price

KLA-Tencor FT-750

Film Thickness Mapping Tool
KLA-Tencor FT-750
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Location: Plano, TX, United States
Unit Price Unstated
Number of Units 1
Manufacturer KLA-Tencor
Model FT-750
Description Film Thickness Mapping Tool
Cassette to Cassette YES
Other Information 
  • Serial Number 960254FT750
  • Accommodates Wafer Sizes from 100mm – 200mm
  • Measures Single & Multilayer Films
  • 410nm – 800nm Reflectivity Range
  • Contour, Die and 3-D Mapping
  • COGNEX 3100-4MB Vision System
  • Version 1.20A
  • OLYMPUS Objectives MS Plan 2.5X, 5X, 10X, 20X and 50X
  • Auto Focus
  • 1.5 – 5 Second Measurement Time
  • Integrated Floor Standing System Housing Includes:
  • Dual Cassette Elevators
  • Wafer Sorting Capability
  • Integrated Flat Finder
  • Vacuum Reservoir
Year of Manufacture 1996
Power Requirements 230 V     50/60 Hz     1 Phase