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FULL DESCRIPTION of Item 247842

in Robotic Scrub Tracks
Item ID: 247842

Offered 1 Offered at $ 55,000.00


OnTrak DSS-200 Series II Double Sided Wafer Scrubber

OnTrak DSS-200 Series II Double Sided Wafer Scrubber

  • Cassette to Cassette Handling of up to 200mm Wafers
  • Wet Send Elevator with Enclosure
  • Double Sided Scrub Module
    • Configured for PVA Brushes
  • Single Spin Station – Edge Contact Only
    • Megasonic Scrub Arm with Pre-Tech PT-005J Megasonic Generator
    • IR Drying Lamp
  • Wafer Output Module – Edge Contact Only
  • GEM RS-232 Communication
  • Touch Screen Color CRT Display
  • SPECIAL NOTE: This tool has only been plumbed with DI water. No other liquids have been used.
OnTrak DSS-200 Series II Double Sided Wafer Scrubber
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Location: Austin, Texas, United States
Unit Price $ 55,000.00
Number of Units 1
Manufacturer OnTrak Systems
Model DSS-200 Series II
Wafer Size Range 
  Minimum 100 mm
  Maximum 200 mm
  Set Size 200 mm
Number of Scrub Stations 1
Number of Cassette Elevators 1
Scrub Brush Double Sided
Megasonic Nozzle YES
Fluid Delivery Channels 
  DI Water YES
IR Heat Lamp YES
Power Requirements      50 Hz     1¬†Phase